The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 31, 2018

Filed:

Oct. 13, 2016
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Zhengmao Ye, Austin, TX (US);

Niyaz Khusnatdinov, Round Rock, TX (US);

Edward Brian Fletcher, Austin, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/12 (2006.01); B29C 59/00 (2006.01); B29C 37/00 (2006.01); B29C 59/02 (2006.01); H01L 21/027 (2006.01); B29K 105/00 (2006.01); B29L 31/34 (2006.01);
U.S. Cl.
CPC ...
B29C 59/002 (2013.01); B29C 37/0025 (2013.01); B29C 59/022 (2013.01); B29C 59/026 (2013.01); H01L 21/0271 (2013.01); B29C 2059/023 (2013.01); B29K 2105/0058 (2013.01); B29L 2031/3425 (2013.01);
Abstract

A substrate useful for imprint lithography having a location thereon defining an imprint field, the imprint field further defined by an interior region, a perimeter region surrounding the interior region, and a border, with the perimeter region further including fluid control features. A polymerizable material deposited on the substrate at the imprint field location is allowed to spread on the substrate, with the fluid control relief features redirecting the spreading of the polymerizable material so as to minimize spreading of the polymerizable material beyond the imprint field border as further imprint lithography techniques are then performed.


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