The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 24, 2018

Filed:

Jul. 29, 2011
Applicants:

Koji Nii, Kanagawa, JP;

Makoto Yabuuchi, Kanagawa, JP;

Yasumasa Tsukamoto, Kanagawa, JP;

Kengo Masuda, Kanagawa, JP;

Inventors:

Koji Nii, Kanagawa, JP;

Makoto Yabuuchi, Kanagawa, JP;

Yasumasa Tsukamoto, Kanagawa, JP;

Kengo Masuda, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/088 (2006.01); H01L 27/11 (2006.01); H01L 27/02 (2006.01); H01L 21/265 (2006.01); H01L 29/66 (2006.01); H01L 29/10 (2006.01); G11C 11/412 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11 (2013.01); G11C 11/412 (2013.01); H01L 21/26586 (2013.01); H01L 27/0207 (2013.01); H01L 27/1104 (2013.01); H01L 29/1083 (2013.01); H01L 29/66659 (2013.01);
Abstract

In a region just below an access gate electrode in an SRAM memory cell, a second halo region is formed adjacent to a source-drain region and a first halo region is formed adjacent to a first source-drain region. In a region just below a drive gate electrode, a third halo region is formed adjacent to the third source-drain region and a fourth halo region is formed adjacent to a fourth source-drain region. The second halo region is set to have an impurity concentration higher than the impurity concentration of the first halo region. The third halo region is set to have an impurity concentration higher than the impurity concentration of the fourth halo region. The impurity concentration of the first halo region and the impurity concentration of the fourth halo region are different from each other.


Find Patent Forward Citations

Loading…