The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2018
Filed:
Apr. 29, 2015
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Lauren Wilson, San Jose, CA (US);
Anant Chimmalgi, San Jose, CA (US);
Matthew Panzer, San Jose, CA (US);
Ilya Bezel, Sunnyvale, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 61/30 (2006.01); H05G 2/00 (2006.01); H01J 65/04 (2006.01); H01J 61/02 (2006.01);
U.S. Cl.
CPC ...
H01J 61/302 (2013.01); H01J 61/025 (2013.01); H01J 65/04 (2013.01); H05G 2/008 (2013.01);
Abstract
A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.