The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2018
Filed:
Jan. 12, 2017
Applicant:
Hermes Microvision Inc., Hsinchu, TW;
Inventor:
Shuai Li, Fremont, CA (US);
Assignee:
HERMES MICROVISION, INC., Hsinchu, TW;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/143 (2006.01); H01J 37/28 (2006.01); H01J 3/20 (2006.01); H01J 37/09 (2006.01);
U.S. Cl.
CPC ...
H01J 37/143 (2013.01); H01J 3/20 (2013.01); H01J 37/09 (2013.01); H01J 37/28 (2013.01); H01J 2237/0453 (2013.01); H01J 2237/063 (2013.01); H01J 2237/141 (2013.01); H01J 2237/1415 (2013.01); H01J 2237/2806 (2013.01); H01J 2237/2817 (2013.01);
Abstract
This invention provides a charged particle source, which comprises an emitter and means for generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.