The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2018
Filed:
Nov. 29, 2016
Applicant:
Fei Company, Hillsboro, OR (US);
Inventor:
Erik René Kieft, Eindhoven, NL;
Assignee:
FEI Cmnpany, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/26 (2006.01); H01J 37/04 (2006.01); H01J 37/244 (2006.01); H01J 37/147 (2006.01); H01J 37/22 (2006.01);
U.S. Cl.
CPC ...
H01J 37/045 (2013.01); H01J 37/147 (2013.01); H01J 37/226 (2013.01); H01J 37/244 (2013.01); H01J 2237/0432 (2013.01); H01J 2237/152 (2013.01);
Abstract
A method of investigating a specimen using charged particle microscopy, comprising the following steps: