The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2018
Filed:
Sep. 04, 2014
Canon Kabushiki Kaisha, Tokyo, JP;
Masatoshi Endo, Utsunomiya, JP;
Akihiko Kawamura, Tokyo, JP;
Naoto Ohkawa, Utsunomiya, JP;
Tetsuji Kazaana, Utsunomiya, JP;
Takanori Morooka, Saitama, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides a method of obtaining a position of a second shot region next to a first shot region, out of a plurality of shot regions formed on a substrate, comprising a first detection step of detecting a position of a first mark arranged in the first shot region, a second detection step of detecting a position of a mark more distant from the first mark, out of a second mark and a third mark arranged in the second shot region, and a determination step of determining the position of the second shot region based on a detection result in the first detection step and a detection result in the second detection step.