Three-axis microelectromechanical systems devices

Abstract

The embodiments described herein provide microelectromechanical systems (MEMS) devices, such as three-axis MEMS devices that can sense acceleration in three orthogonal axes (e.g., x-axis, y-axis, and z-axis). In general, the embodiments described can provide decoupling between the sense motions of all three axes from each other. This decoupling is facilitated by the use of an inner frame, and an outer frame, and the use of rotative spring elements combined with translatory spring elements that have asymmetric stiffness. Specifically, the translatory spring elements facilitate translatory motion in two directions (e.g., the x-direction and y-direction) and have an asymmetric stiffness configured to compensate for an asymmetric mass used to sense in the third direction (e.g., the z-direction).