The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10030317 B1

PDF
Full Text
Expired
Date of Patent:
Jul. 24, 2018

Filed:

Oct. 17, 2014
Applicant:

Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);

Inventors:

Peter L. Kellerman, Essex, MA (US);

Frederick M. Carlson, Potsdam, NY (US);

David Morrell, Wakefield, MA (US);

Brian Mackintosh, Concord, MA (US);

Nandish Desai, Waltham, MA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 15/06 (2006.01); C30B 15/14 (2006.01); C30B 15/22 (2006.01); C30B 15/26 (2006.01); C30B 29/64 (2006.01); C30B 11/00 (2006.01); C30B 15/00 (2006.01); C30B 29/06 (2006.01);
U.S. Cl.
CPC ...
C30B 15/06 (2013.01); C30B 11/001 (2013.01); C30B 11/003 (2013.01); C30B 11/006 (2013.01); C30B 15/002 (2013.01); C30B 15/14 (2013.01); C30B 15/22 (2013.01); C30B 15/26 (2013.01); C30B 29/06 (2013.01); C30B 29/64 (2013.01); Y10T 117/1044 (2015.01); Y10T 117/1048 (2015.01); Y10T 117/1068 (2015.01);
Abstract

An apparatus may include a crucible configured to contain the melt, the melt having an exposed surface separated from a floor of the crucible by a first distance, a housing comprising a material that is non-contaminating to the melt, the housing comprising a plurality of sidewalls and a top that are configured to contact the melt, and a plurality of heating elements isolated from the melt and disposed along a transverse direction perpendicular to a pulling direction of the crystalline sheet, the plurality of heating elements being individually powered, wherein the plurality of heating elements are disposed at a second set of distances from the exposed surface of the melt that are less than the first distance, and wherein the plurality of heating elements are configured to vary a heat flux profile along the transverse direction when power is supplied individually to the plurality of heating elements.


Find Patent Forward Citations

Kellerman, Peter. (2018). Apparatus and method for controlling thickness of a crystalline sheet grown on a melt (U.S. Patent No. 10030317). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10030317

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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