The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 24, 2018

Filed:

Dec. 04, 2014
Applicant:

Siltectra Gmbh, Dresden, DE;

Inventors:

Lukas Lichtensteiger, Zurich, CH;

Jan Richter, Dresden, DE;

Wolfram Drescher, Dresden, DE;

Assignee:

Siltectra, GmbH, Dresden, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/00 (2006.01); H01L 21/304 (2006.01); H01L 21/02 (2006.01); H01L 31/18 (2006.01); C30B 1/02 (2006.01); C30B 29/40 (2006.01); C30B 33/00 (2006.01); H01L 33/00 (2010.01); H01L 33/32 (2010.01);
U.S. Cl.
CPC ...
B05D 3/007 (2013.01); C30B 1/023 (2013.01); C30B 29/406 (2013.01); C30B 33/00 (2013.01); H01L 21/02002 (2013.01); H01L 21/304 (2013.01); H01L 31/1804 (2013.01); H01L 33/0075 (2013.01); H01L 33/0079 (2013.01); H01L 33/32 (2013.01); Y02E 10/547 (2013.01); Y02P 70/521 (2015.11);
Abstract

The invention relates to a method of producing at least one layer of solid material. This method comprises at the very least the steps of: providing a carrier substrate with a first exposed surface and with a second exposed surface; producing a detachment layer in the carrier substrate or over the first exposed surface of the carrier substrate, the detachment layer having an exposed surface; producing the first layer of solid material over the exposed surface of the detachment layer, the first layer of solid material having a free surface spaced apart from the detachment layer; positioning or forming a receiving layer on the second exposed surface of the carrier substrate or on the free surface of the first layer of solid material; generating stresses within the detachment layer, the stresses being generated by tempering at least the receiving layer, a crack propagating within the detachment layer or in the boundary region between the detachment layer and the first layer of solid material as a result of the stresses, the first layer of solid material being split off from the previously produced multi-layer arrangement by the crack.


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