The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2018
Filed:
Dec. 06, 2016
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Cheng San Chou, Hsin-Chu, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Abstract
The present disclosure relates to a capacitive fingerprint sensor having an air gap, which is disposed under a sensing electrode and that is configured to improve sensing sensitivity by reducing a parasitic capacitance of the capacitive fingerprint sensor, and an associated method. In some embodiments, the capacitive fingerprint sensor includes a plurality of semiconductor devices disposed over a substrate. An interconnect structure is disposed over the semiconductor devices. A sensing electrode is disposed over the interconnect structure to form a capacitance between the sensing electrode and finger skins. An air gap is disposed under the sensing electrode and enclosed by the sensing electrode and the interconnect structure.