The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 10, 2018

Filed:

May. 15, 2017
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Amy N. Bowers, Campbell, CA (US);

Luisa D. Bozano, Los Gatos, CA (US);

Andrea Fasoli, San Jose, CA (US);

Krystelle Lionti, San Jose, CA (US);

Elizabeth M. Lofano, Los Gatos, CA (US);

Robert D. Miller, San Jose, CA (US);

Linda K. Sundberg, Los Gatos, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01); H01L 21/02 (2006.01); C03C 17/25 (2006.01); H01L 31/046 (2014.01); B01F 1/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/30 (2013.01); C03C 17/253 (2013.01); H01L 21/02203 (2013.01); H01L 21/02255 (2013.01); H01L 21/02282 (2013.01); B01F 2001/0044 (2013.01); C03C 2217/211 (2013.01); H01L 21/02623 (2013.01); H01L 31/046 (2014.12);
Abstract

Initial film layers prepared from tin(II) chloride spontaneously generate open cavities when the initial film layers are thermally cured to about 400° C. using a temperature ramp of 1° C./minute to 10° C./minute while exposed to air. The openings of the bowl-shaped cavities have characteristic dimensions whose lengths are in a range of 30 nm to 300 nm in the plane of the top surfaces of the cured film layers. The cured film layers comprise tin oxide and have utility in gas sensors, electrodes, photocells, and solar cells.


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