The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 10, 2018

Filed:

Sep. 27, 2017
Applicant:

Nikon Metrology NV, Leuven, BE;

Inventor:

Roger Hadland, Chipperfield, GB;

Assignee:

NIKON METROLOGY NV, Leuven, BE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 35/10 (2006.01); H01J 35/02 (2006.01); H01J 29/48 (2006.01); F16C 33/76 (2006.01); H02M 1/32 (2007.01); H05G 1/12 (2006.01); H02M 7/10 (2006.01); H01J 35/04 (2006.01); F16J 15/16 (2006.01); H01J 35/16 (2006.01); F16C 35/04 (2006.01);
U.S. Cl.
CPC ...
H01J 35/025 (2013.01); F16C 33/768 (2013.01); F16C 35/042 (2013.01); F16J 15/16 (2013.01); H01J 29/48 (2013.01); H01J 35/04 (2013.01); H01J 35/101 (2013.01); H01J 35/106 (2013.01); H01J 35/108 (2013.01); H01J 35/16 (2013.01); H02M 1/32 (2013.01); H02M 7/106 (2013.01); H05G 1/12 (2013.01); H01J 2235/0236 (2013.01); H01J 2235/083 (2013.01); H01J 2235/086 (2013.01); H01J 2235/087 (2013.01); H01J 2235/1046 (2013.01); H01J 2235/1204 (2013.01); H01J 2235/1262 (2013.01); H01J 2235/20 (2013.01);
Abstract

Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerized tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.


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