The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 10, 2018

Filed:

Mar. 13, 2015
Applicant:

Hitachi High-technologies Corporation, Tokyo, JP;

Inventors:

Nobuhiro Shiramizu, Tokyo, JP;

Hideharu Mikami, Toyko, JP;

Koichi Watanabe, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/3581 (2014.01);
U.S. Cl.
CPC ...
G01N 21/3581 (2013.01); G01N 2201/061 (2013.01);
Abstract

The terahertz wave measuring device includes a pulsed laser light generation unit, a seed light generation unit, a terahertz wave generatorthat generates terahertz waves, a terahertz wave detectoron which the terahertz waves that are generated from the terahertz wave generator and that have interacted with a measurement objectand the pump light are incident and that generates terahertz wave detection light, an interference optical systemthat multiplexes the terahertz wave detection light and reference lightof the same wavelength as the terahertz wave detection light to generate a plurality of interfering light beams, a plurality of light detectorsthat detect the interfering light beams, and a signal processing unitthat outputs an intensity signal and/or a phase signal of the terahertz waves by performing arithmetic operations on the outputs of the plurality of light detectors.


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