The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2018
Filed:
May. 20, 2015
Ebara Corporation, Tokyo, JP;
Teruaki Hombo, Tokyo, JP;
Junji Kunisawa, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
A substrate cleaning apparatusincludes a cleaning memberthat abuts on a substrate W to scrub and clean the substrate W, a holding memberthat holds the cleaning member, an air cylinderthat generates force to press the cleaning memberagainst the substrate W, a displacement sensorthat measures a position of the holding member, and a control devicethat determines the replacement time of the cleaning memberbased on the position of the holding member. The position of the holding memberincludes a cleaning position and a non-cleaning position. The control devicedetermines the replacement time of the cleaning memberfrom change in the cleaning position while a plurality of substrates W are continuously scrubbed and cleaned.