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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10016877 B1

PDFFull Text
Date of Patent:
Jul. 10, 2018

Filed:

Aug. 22, 2016

Printed chemical mechanical polishing pad having abrasives therein and system for printing

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Kasiraman Krishnan, Milpitas, CA (US);

Nag B. Patibandla, Pleasanton, CA (US);

Periya Gopalan, San Jose, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Fish & Richardson P.C.

Primary Examiner:

Mary Lynn F Theisen

Int. Cl.
CPC ...
B29C 64/20 (2017.01); B29C 64/209 (2017.01); B29C 64/112 (2017.01); B29C 64/165 (2017.01); B33Y 30/00 (2015.01); B24D 18/00 (2006.01); B33Y 10/00 (2015.01); B33Y 80/00 (2015.01); B24B 37/24 (2012.01); B24D 3/28 (2006.01); B33Y 50/02 (2015.01); B29C 64/386 (2017.01); B29K 101/10 (2006.01); B29K 105/16 (2006.01); B29K 101/12 (2006.01); B29K 105/00 (2006.01); B29L 31/00 (2006.01);
U.S. Cl.
CPC ...
B24D 18/0054 (2013.01); B24B 37/245 (2013.01); B24D 3/28 (2013.01); B29C 64/112 (2017.08); B29C 64/165 (2017.08); B29C 64/386 (2017.08); B33Y 10/00 (2014.12); B33Y 30/00 (2014.12); B33Y 50/02 (2014.12); B33Y 80/00 (2014.12); B29K 2101/10 (2013.01); B29K 2101/12 (2013.01); B29K 2105/0067 (2013.01); B29K 2105/16 (2013.01); B29L 2031/736 (2013.01);
Abstract

A method of fabricating a polishing layer of a polishing pad includes determining a desired distribution of particles to be embedded within a polymer matrix of the polishing layer. A plurality of layers of the polymer matrix is successively deposited with a 3D printer, each layer of the plurality of layers of polymer matrix being deposited by ejecting a polymer matrix precursor from a nozzle. A plurality of layers of the particles is successively deposited according to the desired distribution with the 3D printer. The polymer matrix precursor is solidified into a polymer matrix having the particles embedded in the desired distribution.

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