The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2018
Filed:
Nov. 15, 2016
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Albert Birner, Regensburg, DE;
Tobias Herzig, Regensburg, DE;
Assignee:
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/66 (2006.01); H01L 21/768 (2006.01); H01L 23/48 (2006.01); H01L 23/31 (2006.01);
U.S. Cl.
CPC ...
H01L 22/26 (2013.01); H01L 21/76898 (2013.01); H01L 22/12 (2013.01); H01L 22/20 (2013.01); H01L 22/30 (2013.01); H01L 22/32 (2013.01); H01L 23/481 (2013.01); H01L 23/3107 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A method of forming an electronic device includes forming a first opening and a second opening in a workpiece. The first opening is deeper than the second opening. The method further includes forming a fill material within the first opening to form part of a through via and forming the fill material within the second opening.