The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2018
Filed:
Nov. 18, 2015
Applicant:
Rudolph Technologies, Inc., Flanders, NJ (US);
Inventors:
James H. Greer, Norwood, MA (US);
Troy Palm, Eden Prairie, MN (US);
Assignee:
Rudolph Technologies, Inc., Flanders, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); H01L 21/67288 (2013.01); H01L 21/6838 (2013.01); H01L 21/68728 (2013.01); H01L 21/673 (2013.01); H01L 21/67346 (2013.01); H01L 21/6875 (2013.01); H01L 21/68714 (2013.01); H01L 21/68721 (2013.01);
Abstract
A method and apparatus for detecting and handling deformed substrates, thus allowing them to be processed, and for increasing device yield on the substrate is herein disclosed. A sensor detects deformity, then the substrate is flattened, allowing a support to hold it securely.