The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2018
Filed:
Oct. 21, 2016
Jeol Ltd., Tokyo, JP;
Naoki Hosogi, Tokyo, JP;
JEOL Ltd., , JP;
Abstract
There is provided a method capable of calibrating a sample stage easily. This method is for use in a charged particle beam system having the sample stage for moving a sample and an imaging subsystem for capturing a charged particle beam image and obtaining a final image. The method includes the steps of obtaining the final image from the imaging subsystem (step S), obtaining correlation information that associates a given position in the final image with a position of the sample stage assumed when the final image was taken (step S), obtaining length information about a length per pixel of the final image at a final magnification (step S), and finding a correction between coordinates of the final image and coordinates of the sample stage on the basis of the correlation information and of the length information (step S).