The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2018
Filed:
Dec. 21, 2016
Applicant:
Jeol Ltd., Tokyo, JP;
Inventor:
Shigeyuki Morishita, Tokyo, JP;
Assignee:
JEOL Ltd., , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/00 (2006.01); H01J 37/141 (2006.01); H01J 37/12 (2006.01); H01J 37/145 (2006.01);
U.S. Cl.
CPC ...
H01J 37/141 (2013.01); H01J 37/12 (2013.01); H01J 37/145 (2013.01); H01J 2237/1532 (2013.01); H01J 2237/1534 (2013.01);
Abstract
There are disclosed an aberration correction method and a charged particle beam system capable of correcting off-axis first order aberrations. The aberration correction method is for use in the charged particle beam system () equipped with an aberration corrector () which has plural stages of multipole elements () and a transfer lens system () disposed between the multipole elements (). The method includes varying the excitation of the transfer lens system () and correcting off-axis first order aberrations.