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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10012980 B1

PDFFull Text
Date of Patent:
Jul. 03, 2018

Filed:

Jun. 12, 2014

Modifying operational efficiency by repositioning process apparatus

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Taku Mizutani, Tokyo, JP;

Ichiro Namioka, Tokyo, JP;

Toshihiko Iijima, Tokyo, JP;

Shigenori Todate, Tokyo, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorneys:

Nath, Goldberg & Meyer

Jerald L. Meyer

Primary Examiner:

Mohammad Ali

Assistant Examiner:

Kelvin Booker

Int. Cl.
CPC ...
G05B 19/41 (2006.01); H01L 21/67 (2006.01); G05B 19/418 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
G05B 19/4189 (2013.01); G05B 2219/31277 (2013.01); G05B 2219/32271 (2013.01); G05B 2219/45031 (2013.01); H01L 21/67276 (2013.01); H01L 21/67727 (2013.01); Y02P 80/114 (2015.11); Y02P 90/20 (2015.11); Y02P 90/28 (2015.11);
Abstract

There is provided a production processing system including: a production efficiency improvement device configured to select a processing apparatus that processes workpieces in consideration of a position of each of a plurality of processing apparatuses arranged along a transfer path; and a transfer control device configured to move a transfer apparatus that transfers workpieces from a predetermined position on the transfer path to the selected processing apparatus.

Find Patent Forward Citations

Mizutani, Taku. (2018). Modifying operational efficiency by repositioning process apparatus (U.S. Patent No. 10012980). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10012980

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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