The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 26, 2018

Filed:

Mar. 27, 2017
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Tao Han, Clifton Park, NY (US);

Man Gu, Malta, NY (US);

Jinping Liu, Ballston Lake, NY (US);

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/58 (2006.01); H01L 29/66 (2006.01); H01L 21/28 (2006.01); H01L 21/8234 (2006.01); H01L 21/60 (2006.01);
U.S. Cl.
CPC ...
H01L 23/58 (2013.01); H01L 21/28141 (2013.01); H01L 21/823468 (2013.01); H01L 29/6656 (2013.01); H01L 29/66553 (2013.01); H01L 29/66689 (2013.01); H01L 29/66719 (2013.01); H01L 2021/6009 (2013.01);
Abstract

Structures for spacers in a device structure for a field-effect transistor and methods for forming spacers in a device structure for a field-effect transistor. First and second spacers are formed adjacent to a surface of a device component from respective conformal layers. The first spacer is positioned between the surface of the device component and the second spacer. The second spacer includes a plurality of first lamina and a plurality of second lamina that are arranged in an alternating sequence with the first lamina. The first spacer has a first dielectric constant, and the second spacer has a second dielectric constant that is greater than the first dielectric constant.


Find Patent Forward Citations

Han, Tao. (2018). Laminated spacers for field-effect transistors (U.S. Patent No. 10008456). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10008456

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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