The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2018
Filed:
Mar. 02, 2015
Asml Netherlands B.v., Veldhoven, NL;
Joeri Lof, Eindhoven, NL;
Joost Kauffman, Enschede, NL;
Martin Dieter Nico Peters, Veldhoven, NL;
Petrus Theodorus Rutgers, Hengelo, NL;
Martijn Hendrikus Wilhelmus Stopel, Enschede, NL;
Gerard Van Den Eijkel, Enschede, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Raimond Visser, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A sensor system configured to determine a position of a substrate having an edge. The sensor system includes a radiation source arranged to emit a radiation bundle, a reflective element, a detector device and a substrate table having a supporting surface for supporting the substrate. The supporting surface is at least partly along a plane. The radiation source and the detector device are arranged on a first side of the plane. The reflective element is arranged on a second side of the plane other than the first side. The reflective element is arranged to create a reflected bundle by reflecting the radiation bundle. The reflective element is arranged to illuminate the edge with the reflected bundle. The detector device is arranged to receive the reflected bundle.