The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2018
Filed:
Feb. 23, 2017
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Thomas Grille, Villach, AT;
Ursula Hedenig, Villach, AT;
Michael Roesner, Villach, AT;
Gudrun Stranzl, Goedersdorf, AT;
Martin Zgaga, Rosegg, AT;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 7/00 (2006.01); B01D 67/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0061 (2013.01); B01D 67/0034 (2013.01); B81C 1/00904 (2013.01); B81B 2201/0257 (2013.01); B81C 2201/0132 (2013.01);
Abstract
A hole plate and a MEMS microphone arrangement are disclosed. In an embodiment a hole plate includes a substrate with a first main surface, a second main surface, and a lateral surface and a perforation structure formed within the substrate, the perforation structure having a plurality of through-holes through the substrate, wherein the through-holes and the lateral surface are a result of a simultaneous dry etching step.