The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2018
Filed:
Jun. 25, 2015
Csmc Technologies Fab1 Co., Ltd., Jiangsu, CN;
Yonggang Hu, Jiangsu, CN;
CSMC TECHNOLOGIES FAB1 CO., LTD., Jiangsu, CN;
Abstract
A MEMS microphone includes a substrate (), a supporting part (), an upper polar plate () and a lower polar plate (). The substrate () is provided with an opening () penetrating the middle thereof; the lower polar plate () straddles the opening (); the supporting part () is fixed on the lower polar plate (); the upper polar plate () is affixed to the supporting part (); an accommodating cavity () is formed among the supporting part (), the upper polar plate () and the lower polar plate (); a recess () opposite to the accommodating cavity () is arranged in an intermediate region of at least one of the upper polar plate () and the lower polar plate (), and insulation is achieved between the upper polar plate () and a lower polar plate ().