The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2018
Filed:
May. 08, 2017
Applicant:
Tokyo Electron Limited, Minato-ku, Tokyo, JP;
Inventors:
Ian Colgan, Ballivor, IE;
Ioan Domsa, Dublin, IE;
George Eyres, Dublin, IE;
Saito Makoto, Dublin, IE;
Noel O'Shaughnessy, Dublin, IE;
Toru Ishii, Dublin, IE;
David Hurley, Dublin, IE;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 43/12 (2006.01); H01L 27/22 (2006.01); C21D 9/00 (2006.01); H01L 21/477 (2006.01); C21D 1/42 (2006.01); C21D 1/54 (2006.01); G11C 11/16 (2006.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01); C21D 1/42 (2013.01); C21D 1/54 (2013.01); C21D 9/0018 (2013.01); G11C 11/16 (2013.01); H01L 21/477 (2013.01); H01L 27/222 (2013.01);
Abstract
Embodiments are described for annealing systems and related methods to process microelectronic workpieces using vertical multi-batch perpendicular magnetic annealing systems that allow for a side-by-side configuration of multiple annealing systems to satisfy reduced footprint requirements.