The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 19, 2018

Filed:

Sep. 05, 2012
Applicants:

Ioan Lucian Prejbeanu, Seyssinet Pariset, FR;

Celine Portemont, Semons, FR;

Clarisse Ducruet, Grenoble, FR;

Inventors:

Ioan Lucian Prejbeanu, Seyssinet Pariset, FR;

Celine Portemont, Semons, FR;

Clarisse Ducruet, Grenoble, FR;

Assignee:

CROCUS TECHNOLOGY SA, Grenoble, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/82 (2006.01); G01R 33/09 (2006.01); G11C 11/16 (2006.01); H01L 43/08 (2006.01); H01L 21/02 (2006.01); B82Y 10/00 (2011.01); H01L 43/12 (2006.01); H01F 41/30 (2006.01); B82Y 40/00 (2011.01); B82Y 25/00 (2011.01);
U.S. Cl.
CPC ...
H01L 29/82 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); G01R 33/098 (2013.01); G11C 11/16 (2013.01); G11C 11/161 (2013.01); G11C 11/1675 (2013.01); H01F 41/307 (2013.01); H01L 21/02104 (2013.01); H01L 43/08 (2013.01); H01L 43/12 (2013.01); B82Y 25/00 (2013.01);
Abstract

The present disclosure concerns a method of fabricating a magnetic tunnel junction suitable for a magnetic random access memory (MRAM) cell and comprising a first ferromagnetic layer, a tunnel barrier layer, and a second ferromagnetic layer, comprising: forming the first ferromagnetic layer; forming the tunnel barrier layer; and forming the second ferromagnetic layer; wherein said forming the tunnel barrier layer comprises depositing a layer of metallic Mg; and oxidizing the deposited layer of metallic Mg such as to transform the metallic Mg into MgO; the step of forming the tunnel barrier layer being performed at least twice such that the tunnel barrier layer comprises at least two layers of MgO.


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