The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2018
Filed:
Nov. 12, 2015
Applicant:
Ulvac, Inc., Chigasaki-shi, Kanagawa, JP;
Inventors:
Assignee:
Ulvac, Inc., Chigasaki-Shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 18/02 (2006.01); C23C 8/08 (2006.01); C23C 16/24 (2006.01); C23C 16/34 (2006.01); C23C 16/448 (2006.01); C23C 16/06 (2006.01); C23C 16/46 (2006.01);
U.S. Cl.
CPC ...
C23C 18/02 (2013.01); C23C 8/08 (2013.01); C23C 16/06 (2013.01); C23C 16/24 (2013.01); C23C 16/345 (2013.01); C23C 16/4488 (2013.01); C23C 16/46 (2013.01);
Abstract
A catalytic chemical vapor deposition apparatus comprising a catalyst wire including a tantalum wire and a boride layer formed on a surface of the tantalum wire is used. The boride of the metal tantalum (tantalum boride) is harder than the metal tantalum. Therefore, by using the tantalum wire having the boride layer formed on the surface thereof as a catalyst wire, it is possible to reduce thermal expansion of the catalyst wire, improve mechanical strength, and prolong the service life. Further, by performing energization heating of the catalyst wire by continuous energization, it is further possible to prolong the service life of the catalyst wire.