Harbin Institute of Technology

Zijie Hua

Jian Liu

Chenguang Liu

Xiaoyu You

Kang Gu

Chongliang Zou

This application relates to optical precision measurement and provides a dark-field confocal microscopy measurement apparatus based on vortex interference. A vortex light generation module is configured to generate vortex light with a predetermined order. A vortex light interference module is configured to: divide the vortex light into reference light and imaging light, direct the imaging light to irradiate a scanning position of a to-be-measured sample, to obtain sample reflection light of the scanning position, and enable the reference light and the sample reflection light to overlap and interfere with each other to obtain interference light. A rotation demodulation module is configured to perform rotation demodulation on the interference light, to obtain amplitude and phase information of the scanning position, so as to characterize the amplitude and phase information of defects and realize detection of phase-type defects.

Dark-field confocal microscopy measurement apparatus based on vortex interference

This application relates to the technical field of confocal microscopy measurement, and provides a dark-field confocal microscopy measurement apparatus and method based on multi-fractional angular momentum demodulation. The apparatus includes a modulated illumination module and a signal collection and demodulation module. The modulated illumination module obtains vortex light with different fractional orders through modulation using vortex phase patterns with different fractional orders, so as to scan a to-be-measured sample. The vortex light with different fractional orders irradiates the to-be-measured sample and is reflected out. The signal collection and demodulation module collects the reflected light and generates dark-field images, and finally performs cross-correlation processing on the dark-field images generated under the vortex light with different fractional orders, to obtain high SNR data.

Dark-field confocal microscopy measurement apparatus and method based on multi-fractional angular momentum demodulation

Disclosed are a dark-field confocal microscopic measurement apparatus and method based on vortex dichroism. The apparatus includes an array vortex light generation module, an array vortex light illumination module and an array dark-field confocal detection module; an array vortex wave plate of the array vortex light generation module generates vortex light to illuminate a sample of the array vortex light illumination module; and the array dark-field confocal detection module extracts scattering signals, and identifies differences between scattering signals collected under the illumination of opposite-order vortex light. Three-dimensional distribution information of defects, such as subsurface scratches, abrasion, subsurface cracks, and bubbles, can be extracted by directly analyzing the scattering signals under the 1-order vortex illumination; and chirality information of the micro-nano material can be obtained by analyzing difference values of the scattering signals under the illumination of the opposite-order vortex light.

Dark-field confocal microscopic measurement apparatus and method based on vortex dichroism

Provided are a dark-field confocal microscopy measurement apparatus and method. The apparatus includes: a fractional vortex beam module configured to generate first fractional vortex beam and second fractional vortex beam; an optical scanning module configured to scan a sample by using the first fractional vortex beam and the second fractional vortex beam to obtain first signal return light and second signal return light respectively; a dark-field detection module configured to perform dark-field detection on the first signal return light and the second signal return light to obtain a first fractional-order dark-field image and a second fractional-order dark-field image respectively; a differential dark-field scattered image determining module configured to differentiate the first fractional-order dark-field image from the second fractional-order dark-field image to obtain a differential dark-field scattered image; and a defect determining module configured to process the differential dark-field scattered image to obtain a sample defect.

Dark-field confocal microscopy measurement apparatus and method based on differential fractional vortex beam

This application relates to the technical field of confocal microscopy measurement and provides a dark-field confocal microscopy measurement apparatus and method based on time-varying fractional-order vortex demodulation. The apparatus includes a time-varying modulated illumination module, an optical scanning module, a signal collection and demodulation module, a function generator, and a sample platform. The function generator is separately connected with. The time-varying modulated illumination module is configured to emit fractional-order vortex light to the optical scanning module. The optical scanning module is configured to transmit the fractional-order vortex light to the to-be-measured sample on the sample platform and transmit a reflected light signal to the signal collection and demodulation module. The signal collection and demodulation module is configured to collect the reflected light signal, and perform dark-field confocal detection on the reflected light signal based on a reference signal, to obtain measurement information of the to-be-measured sample.

Dark-field confocal microscopy measurement apparatus and method based on time-varying fractional-order vortex demodulation

This application provides a vortex dichroism dark-field confocal microscopy measurement apparatus based on spiral transformation. An opposite-order vortex beam generation module is configured to generate a mixed vortex beam, a sample scanning module is configured to irradiate a scanning position of a to-be-measured sample by using the mixed vortex beam, to obtain a sample reflection beam. A spiral transformation module is configured to spatially separate the sample reflection beam to obtain spatially separated beams. A multi-order detection module is configured to detect the spatially separated beams to obtain a vortex dichroism signal at the scanning position. When the scanning position of the to-be-measured sample is defect-free, the vortex dichroism signal is zero. Conversely, when defects are present at the scanning position, the vortex dichroism signal is non-zero. The positive and negative the vortex dichroism signal respectively correspond to the left-handed and right-handed chirality of the defects.

Vortex dichroism dark-field confocal microscopy measurement apparatus based on spiral transformation

Disclosed are a differential dark-field confocal microscopic measurement apparatus and method based on a polarized vector light beam. The apparatus includes a vector polarized illumination light generation module, a light beam scanning illumination module and a differential dark-field confocal imaging module; a half wave plate and a vortex wave plate are regulated to generate radially polarized signal light and azimuthally polarized signal light respectively, and an acousto-optic modulator is controlled to modulate light beams into a pulse form, so that the radially polarized signal light and the azimuthally polarized signal light alternately illuminate during the same period, both of which have a time occupation ratio of 50%, separately. Difference values of scattering signals under separate illumination of the radially polarized signal light and the azimuthally polarized signal light are analyzed, and super-resolution detection imaging can be performed on the three-dimensional distribution information of defects such as subsurface scratches, and abrasion.

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Harbin, China

Zijie Hua