Hangzhou Dianzi University

Zhihua Dong

Zhiqun Cheng

Guohua Liu

Hui Liu

Jian Li

Shiqi Li

Huajie Ke

An enhancement-mode III-V HEMT based on an all-solid-state battery is provided. In which, a second semiconductor layer and a first semiconductor layer are sequentially formed on a substrate, and a heterostructure is formed between the second semiconductor layer and the first semiconductor layer; a source electrode is electrically connected to a drain electrode through a 2DEG generated in the heterostructure; a gate electrode is used to control on-off of the 2DEG in the heterostructure; and an all-solid-state battery is arranged between the source electrode and the gate electrode, is composed of at least one group of battery units connected in series or connected in series and parallel, and is used to deplete the 2DEG in a corresponding region of the heterostructure.

Enhancement-mode III-V HEMT based on all-solid-state battery

Disclosed is a novel III-V heterojunction field effect transistor comprising a substrate layer, a first semiconductor layer, a second semiconductor layer, a drain electrode, a source electrode, a gate electrode, a first dielectric layer, second dielectric layers and the like, wherein the first semiconductor layer has a greater bandgap compared with the second semiconductor layer, and the second semiconductor layer and the first semiconductor layer are combined to form a heterostructure. The thickness of the first semiconductor layer is not greater than the critical thickness of two-dimensional electron gas formed in a heterojunction channel, and thus natural 2DEG in the heterojunction channel is depleted. The novel III-V heterojunction field effect transistor has the advantages of being simple in structure, simple in preparation process, stable in performance, high in reliability and the like.

III-V heterojunction field effect transistor

Growing community of inventors

Hangzhou, China

Zhihua Dong