Average Co-Inventor Count = 4.94
ph-index = 14
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (26 from 3,797 patents)
2. Applied Materials, Inc. (18 from 13,771 patents)
3. Tokyo Electron Limited (2 from 10,381 patents)
4. Twitter, Inc. (2 from 410 patents)
48 patents:
1. 11984296 - Substrate support with improved process uniformity
2. 11935724 - Symmetric VHF source for a plasma reactor
3. 11587766 - Symmetric VHF source for a plasma reactor
4. 11315760 - Symmetric plasma process chamber
5. 11195706 - Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators
6. 11146513 - Generating messages having in-message applications
7. 11069553 - Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity
8. 11043361 - Symmetric VHF source for a plasma reactor
9. 10910195 - Substrate support with improved process uniformity
10. 10825656 - Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
11. 10804129 - Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode
12. 10755895 - Ion energy control by RF pulse shape
13. 10741425 - Helium plug design to reduce arcing
14. 10665435 - Chamber with vertical support stem for symmetric conductance and RF delivery
15. 10615006 - Symmetric plasma process chamber