Chinese Academy of Sciences

Changchun Institute of Optics, Fine Mechanics and Physics, Academy of Sciences

Zhaowu Liu

Wenhao Li

Wei Wang

Lin Liu

Shan Jiang

Wenyuan Zhou

Yujia Sun

Hongzhu Yu

Rigalantu Ji

Xuefeng Yao

Xu Liang

Xingyu Zhu

Xinyu Wang

Yanxiu Jiang

Bayan Heshig

Siyu Jin

Heshig Bayan

Yubo Li

Shuo Li

A method and a device for compensating a surface error of a holographic grating substrate based on scanning and exposure technology relates to a technical field of grating development. The method and the device adopt surface error compensation technology based on phase modulation of interference fringes of a scanning beam interference lithography system. The method and the device solve a poor grating diffraction wavefront quality caused by a surface processing error in a field of holographic grating research and improves full-aperture diffraction wavefront quality of a grating. Through coordination between feedback of the displacement measurement apparatus for the position of the two-dimensional worktop and the modulation of the scanning beam interference lithography system, full-aperture compensation of the surface error of the holographic grating substrate is achieved, which not only reduces processing accuracy requirements for the holographic grating substrate, but also improves the full-aperture diffraction wavefront quality of the grating.

Method and device for compensating surface error of holographic grating substrate

The present invention relates to the field of optics, in particular to a hybrid displacement measuring device, comprising a worktable to be measured, a grating ruler, a laser light source, a first beam splitting mirror, a first measuring assembly, and a second measuring assembly which comprises a first interferometer. A hybrid measuring approach that integrates grating and laser is proposed based on the advantages of the two measuring means. The grating ruler is used to perform long-distance measurement distal to the mirror, and the first interferometer is used to perform short-distance measurement proximal to the mirror, thereby solving the problem that it is difficult to guarantee both the range and the precision of displacement measurement of the worktable to be measured.

Hybrid displacement measuring device

The invention relates to the technical field of grating interferometry, in particular to a Littrow grating interferometry device and a use thereof. The device comprises: a two-frequency orthogonal polarization light source, a polarizing beam splitting prism, a reflection assembly, a detector, and a first diffraction grating and a second diffraction grating having identical parameters. The output light of the two-frequency orthogonal polarization light source is split by the polarizing beam splitting prism into horizontally polarizing measuring light which is transmitted and vertically polarizing measuring light which is reflected. The two beams of measuring light undergo diffraction twice between the first diffraction grating and the second diffraction grating, and finally the two beams of measuring light interfere with each other and are incident on the detector. Grating displacement is calculated according to the interference pattern. The invention achieves secondary diffraction under Littrow incidence, and improves the precision of displacement measurement.

Littrow grating interferometry device and use thereof

A bidirectional Littrow two-degree-of-freedom grating interference measurement device based on double gratings includes a transmission two-dimensional grating and a reflection two-dimensional grating. A dual-frequency laser emitted by a light source passes through the transmission two-dimensional grating with a specific grating pitch to form four beams in X direction and Y direction, the four beams are incident on the reflection two-dimensional grating at a Littrow angle, and the four beams diffracted by the reflection two-dimensional grating return to the transmission two-dimensional grating in an incidence direction along the same path; different orders of transmission light of the four beams of light in different directions may form stable interference signals carrying displacement information, and the stable interference signals are received by a detector.

Bidirectional Littrow two-degree-of-freedom grating interference measurement device based on double gratings

Disclosed are a grating displacement measurement device and a grating displacement measurement method using a double-layer floating reading head, a medium, and an apparatus. A first measurement grating group is arranged on two first side edges of a substrate working surface, and a second measurement grating group is symmetrically arranged on both sides of a first reference line and close to a light-through member. A reading component is provided between a first measurement grating and a second measurement grating arranged on the same side, and each reading component is used to collect a first position information of the first measurement grating and a second position information of the second measurement grating. In the technical solutions, by using multi-channel position information output by two reading components in combination with a displacement solution algorithm.

Grating displacement measurement device and method using double-layer floating reading head, medium, and apparatus

A heterodyne two-dimensional grating measuring device and measuring method thereof includes a light source, a reading head, a photoelectric receiving module, and a processor. The light source is configured to generate two beams of linearly polarized light having characteristics of overlapping, polarization orthogonal, and fixed frequency difference. The reading head is configured to receive the two beams of the linearly polarized light, the two beams of the linearly polarized light are respectively incident on a surface of a moving two-dimensional measuring grating to generate ±1-order diffracted lights of two dimensions, and the ±1-order diffracted lights are respectively incident to the photoelectric receiving module through the reading head. The photoelectric receiving module is configured to generate beat frequency signals, the processor is configured to perform differential calculation on the beat frequency signals to realize a displacement measurement of measuring grating for four-fold optical subdivision.

Heterodyne two-dimensional grating measuring device and measuring method thereof

A heterodyne one-dimensional grating measuring device and measuring method thereof, including a light source, a reading head, a photoelectric receiving module, and a signal processing system. The light source is configured to generate two linearly polarized lights having characteristics of overlapping, polarization orthogonal, and fixed frequency difference. The reading head is configured to receive two beams of polarized lights and be respectively incident on a surface of a moving measuring grating to generate a +1-order diffracted light and a −1-order diffracted light. The photoelectric receiving module is configured to receive the +1-order diffracted light and the −1-order diffracted light to form two paths of beat frequency signals. The signal processing system is configured to perform differential calculation on the two paths of the beat frequency signals to realize a displacement measurement of single diffraction of the measuring grating for four-fold optical subdivision.

Heterodyne one-dimensional grating measuring device and measuring method thereof

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Zhaowu Liu