L'air Liquide, Soci&#xe9;t&#xe9; Anonyme Pour L'etude Et L'exploitation Des Proc&#xe9;d&#xe9;s Georges Claude

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Universitéde Montreal

Zenon Zakrzewski

Michel Moisan

Jean-Christophe Rostaing

Jacques Henri Pelletier

Ana Lacoste

Christian Larquet

Daniel Guerin

Yves Alban-Marie Arnal

Roxane Etemadi

Mariusz Jasinski

Thierry L&eacute;on Lagarde

Dariusz Czylkowski

The invention relates to a microwave plasma exciter device which includes a waveguide () for concentrating the microwaves; and a plasma generator () for forming a plasma, which are disposed in a microwave concentration zone.

Microwave plasma exciters

The invention concerns a system including a microwave generator and a rectangular guide connected with the generator. The system is adapted to operate in fundamental (H ) or transverse electrical (TE ) mode, and associated with means providing a standing wave pattern. The system also includes many power connectors arranged in the guide at zones of maximum amplitude for one of the components of the electromagnetic field for splitting the generator power. The power connectors are adjusted so that the sum of their reduced admittance levels brought to the splitter input formed by the guide is in a single unit and many sources, respectively connected to a connector of the guide, via insulating means ensuring a power transmission of the connector to the source without reflecting towards the connector and a device adapting impedance of each source, located downstream of the insulating means, between the latter and associated source.

Power splitter for plasma device

The invention concerns a device for exciting a gas comprising a hollow structure (,) forming a waveguide to be connected to a microwave generator and means for circulating a gas through the structure. The gas circulating means comprise an assembly of at least two hollow tubes (,) made of dielectric material respectively passing through said structure (,) in the zones wherein the amplitude of the electric field associated with the incident wave is substantially the same.

Device for exciting a gas by a surface wave plasma

The present invention relates to a device for generating plasma (ionizing gas) by a propagating surface wave. The device comprises a wave launching structure mounted on a plasma vessel and connected to an impedance matching network. The latter comprises a coupler and a tuner which is either formed by a section of a transmission line or is of the lumped circuitry type. The launching structure may either generate an azimuthally symmetric or a non symmetric propagating wave. This invention also relates to a method and a device for shaping plasma which comprises a plasma vessel receiving a surface wave generator and having a serviceable portion of a size and/or shape substantially different from the shape and/or size of the portion of the plasma vessel receiving the wave generator.

Surface wave launchers to produce plasma columns and means for producing

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Gdansk, Poland

Zenon Zakrzewski