Lam Research Corporation

Zehua Jin

Anthony De La Llera

Takumi Yanagawa

Pratik Mankidy

Stephan K Piotrowski

Jaewon Kim

Dongjun Wu

A plasma lining structure is used in a process chamber to block direct line-of-sight for plasma generated within to grounded surface. The plasma lining structure includes a plurality of sections to cover at least one or more portions of an inside surface of a plasma confinement structure disposed in the process chamber. The sections of the plasma lining structure are positioned between a plasma region and the sidewall of the plasma confinement structure, when the plasma lining structure and the plasma confinement structure are disposed in the plasma chamber, such that the sections directly face the plasma region.

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Houston, TX, United States of America

Zehua Jin