Taiwan Semiconductor Manufacturing Comp. Ltd.

Ze-Ming Wu

Ke-Ying Su

Wen-Hsing Hsieh

Jon-Hsu Ho

Hsiao-Shu Chao

Ke-Wei Su

Ching-Shun Yang

Liang-Yi Chen

Lester Chang

Keng-Hua Kuo

Wen-Koi Lai

KuoPei Lu

Yi-Kan Cheng

Hsien-Hsin Sean Lee

Po-Jui Lin

Chao-Yang Yeh

Sa-Lly Liu

Chia-Ming Ho

Kai-Ming Liu

Chih-Chia Chen

Chien-Chih Kuo

Meng-lin Chung

Shih Hsin Chen

Hsiao-Chu Chao

Li-Fu Ding

A method of generating an IC layout diagram includes receiving an IC layout diagram including a gate region and a gate via, the gate via being positioned at a location within an active region and along a width of the gate region extending across the active region, receiving a first gate resistance value of the gate region, retrieving a second gate resistance value from a resistance value reference based on the location and the width, using the first and second resistance values to determine that the IC layout diagram does not comply with a design specification, and based on the non-compliance with the design specification, modifying the IC layout diagram.

Integrated circuit layout generation method

A method of manufacturing a semiconductor device, a corresponding layout diagram being stored on a non-transitory computer-readable medium, the layout diagram including layout cells, the method including generating the layout diagram including: for a candidate cell amongst the layout cells in the layout diagram, avoiding a discrete calculation of a corresponding parasitic capacitance (PC) description including, within a database which stores predefined cells and corresponding parasitic capacitance (PC) descriptions thereof, searching the database for one amongst the predefined cells (matching predefined cell) that is a substantial match to the candidate cell; and, when a substantial match is found, assigning the PC description of the matching predefined cell to the candidate cell.

Method of manufacturing semiconductor device and system for same

A method of generating an IC layout diagram includes receiving a first gate resistance value of a gate region in an IC layout diagram, the first gate resistance value corresponding to a location of a gate via positioned within an active region and along a width of the gate region extending across the active region, determining a second gate resistance value based on the location and the width, using the first and second resistance values to determine that the IC layout diagram does not comply with a design specification, and based on the non-compliance with the design specification, modifying the IC layout diagram.

A method is disclosed for storing and reusing the PC description of layout cells. A database stores predefined cells and PC descriptions that were previously calculated by a 3D field solver. Regarding a candidate cell from the layout diagram, the database is searched for a substantial match amongst the predefined cells. If there is a match, then the stored PC description of the matching predefined cell is assigned to the candidate cell in the layout diagram, which avoids having to make a discrete calculation for the PC description. If there is no match, then the 3D field solver is applied to the candidate cell in order to calculate the PC description of the candidate cell. To facilitate reusing the newly calculated PC description, the candidate cell and the newly calculated PC description are stored in the database as a new predefined cell and its corresponding PC description.

A method of generating a netlist of an IC device includes receiving gate region information of the IC device. The gate region information includes a width of the gate region, the width extending at least from a first edge of an active region to a second edge of the active region, a location of a gate via positioned within the active region and along the width, and a first gate resistance value corresponding to the gate region. The method includes determining a second gate resistance value based on the location and the width, and modifying the netlist based on the second gate resistance value.

Integrated circuit layout generation method and system

A method of generating a netlist of an IC device includes extracting dimensions of a gate region of the IC device, the dimensions including a width of the gate region, the width extending at least from a first edge of an active region to a second edge of the active region, and a distance from a first end of the width to a gate via positioned along the width. A first gate resistance value corresponding to the gate region is received, a second gate resistance value is determined based on the distance and the width, and the netlist is updated based on the first and second gate resistance values.

Integrated circuit modeling methods and systems

One or more systems and methods for a cell based hybrid resistance and capacitance (RC) extraction are provided. The method includes generating a layout for a semiconductor arrangement, performing a three-dimensional (3D) RC extraction on a target unit cell to obtain a 3D RC result including a coupling capacitance between unit cells, generating a 3D RC netlist based upon the 3D RC result, performing a 2.5 dimensional (2.5D) RC extraction on a peripheral cell to obtain a 2.5D RC netlist, and combining the 3D RC netlist with the 2.5D RC netlist to create a hybrid RC netlist for the layout. In some embodiments, the hybrid RC netlist is generated by stitching the coupling capacitance for at least one of the target unit cell, a repeating unit cell, or the peripheral cell together. In some embodiments, the 3D RC result for the target unit cell is stitched to the repeating unit cell.

System and method for creating hybrid resistance and capacitance (RC) netlist using three-dimensional RC extraction and 2.5 dimensional RC extraction

The present disclosure relates to methods and apparatuses for generating a through-silicon via (TSV) model for RC extraction that accurately models an interposer substrate comprising one or more TSVs. In some embodiments, a method is performed by generating an interposer wafer model having a sub-circuit that models a TSV. The sub-circuit can compensate for limitations in resistive and capacitive extraction of traditional TSV models performed by EDA tools. In some embodiments, the sub-circuit is coupled to a floating common node of the model. The floating common node enables the interposer wafer model to take into consideration capacitive coupling within the interposer. The improved interposer wafer model enables accurate RC extraction of an interposer with one or more TSVs, thereby providing for an interposer wafer model that is consistent between GDS and APR flows.

RC extraction methodology for floating silicon substrate with TSV

A semiconductor device design system comprising at least one processor is configured to define a resistance-capacitance (RC) extraction tool for determining a distance between first and second through-semiconductor-vias extracted from a layout of a semiconductor device. The semiconductor device has a semiconductor substrate and the first and second through-semiconductor-vias in the semiconductor substrate. The semiconductor device design system comprising the at least one processor is also configured to extract parasitic parameters of a coupling in the semiconductor substrate based on the distance determined by the RC extraction tool and a model of the coupling included in a simulation tool.

Semiconductor device design method, system and computer-readable medium

A method comprises analyzing front side conductive patterns and back side conductive patterns on a semiconductor interposer using a machine implemented RC extraction tool, and outputting data representing a plurality of respective RC nodes from the RC extraction tool to a tangible persistent machine readable storage medium. A substrate mesh model of the semiconductor interposer is generated, having a plurality of substrate mesh nodes. Each substrate mesh node is connected to adjacent ones of the plurality of substrate mesh nodes by respective substrate impedance elements. A set of inputs to a timing analysis tool is formed. The plurality of RC nodes are connected to ones of the plurality of substrate mesh nodes of the substrate mesh model. The set of inputs is stored in a tangible machine readable storage medium.

Tool and method for modeling interposer RC couplings

A method includes generating a three-dimensional table. The table cells of the three-dimensional table comprise normalized parasitic capacitance values selected from the group consisting essentially of normalized poly-to-fin parasitic capacitance values and normalized poly-to-metal-contact parasitic capacitance values of Fin Field-Effect Transistors (FinFETs). The three-dimensional table is indexed by poly-to-metal-contact spacings of the FinFETs, fin-to-fin spacings of the FinFETs, and metal-contact-to-second-poly spacings of the FinFETs. The step of generating the three-dimensional table is performed using a computer.

Parasitic capacitance extraction for FinFETs

In a semiconductor device design method performed by at least one processor, first and second electrical components are extracted from a layout of a semiconductor device. The semiconductor device has a semiconductor substrate and the first and second electrical components in the semiconductor substrate. Parasitic parameters of a coupling in the semiconductor substrate between the first and second electrical components are extracted using a first tool. Intrinsic parameters of the first and second electrical components are extracted using a second tool different from the first tool. The extracted parasitic parameters and intrinsic parameters are combined into a model of the semiconductor device. The parasitic parameters of the coupling are extracted based on a model of the coupling included in the second tool.

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Tainan, Taiwan

Ze-Ming Wu