The 13th Research Institute of China Electronics

Yuxing Cui

Xingchang Fu

Yongliang Tan

Zexian Hu

Xiangwu Liu

Xingzhong Fu

Lijiang Zhang

A method for preparing an ohmic contact electrode of a GaN-based device. Said method comprises the following steps: growing a first dielectric layer () on an upper surface of a device (S); implanting silicon ions and/or indium ions in a region of the first dielectric layer () corresponding to an ohmic contact electrode region, and in the ohmic contact electrode region of the device (S); growing a second dielectric layer () on an upper surface of the first dielectric layer () (S); activating the silicon ions and/or the indium ions by means of a high temperature annealing process, so as to form an N-type heavy doping (S); respectively removing portions, corresponding to the ohmic contact electrode region, of the first dielectric layer () and the second dielectric layer () (S); growing a metal layer () on the upper surface of the ohmic contact electrode region of the device, so as to form an ohmic contact electrode (S). The ohmic contact electrode prepared by the method can ensure that the metal layer () has flat surfaces, smooth and regular edges, and said electrode has stable device breakdown voltage, and is reliable and has a long service life.

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Yuxing Cui