Jeol Ltd.

Japan Display Inc.

Yuta Murakami

Akira Abe

Yoshikazu Nemoto

Norio Nakamura

Shuhei Abe

Masahiro Kubota

Masatsugu Kawamoto

Hiroki Mezaki

Takakuni Maeda

A first spring array and a second spring array are provided in a holder body. Three sample plates can be mounted in the holder body. On each sample plate, pressing-up forces from the first spring array and the second spring array are applied, but upward movement of each sample plate is restricted by an inner surface of a cover.

Sample plate holder

An imaging device images a sample holder held by a sample stage. At a front side (target side) of the imaging device, a light emitter device array and a mask array are provided. A plurality of light beams are generated by the light emitter device array. A plurality of center parts of the plurality of light beams are masked by the mask array. A plurality of shadows produced thereby are covered by a plurality of peripheral parts of the plurality of light beams.

Charged particle beam apparatus

First shape data representing a three-dimensional shape of a sample unit including a sample is generated based on a result of three-dimensional shape measurement of the sample. Second shape data representing a three-dimensional shape of a structure which exists in a sample chamber is generated. Movement of the sample unit is controlled based on the first shape data and the second shape data such that collision of the sample unit with the structure does not occur.

Charged particle beam system and method of measuring sample using scanning electron microscope

A display apparatus includes: a display device including pixels each including a light emitting element; a voltage generator configured to generate a plurality of different voltages; a switching device configured to be capable of switching the voltages in a manner such that any one of the voltages is applied to each of the pixels; and a controller configured to control operation of the switching device. The controller is configured to cause, at least once during a period for displaying an image corresponding to one frame, the switching device to operate in a manner such that voltages applied to the pixel are switched from a lower to a higher voltage.

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Tokyo, Japan

Yuta Murakami