National Institute of Metrology, China

Yushu Shi

Shu Zhang

Fang Wang

Lei Pi

Zhoumiao Shi

Xiangpeng Bu

A composite measurement system for measuring nanometer displacement is provided. The system includes: a light source, a polarization beam splitting prism, a first phase change module, a second phase change module, a first right-angle prism, a second right-angle prism, a non-polarization beam splitting prism, a scalar interference light collection module, a vector interference light collection module and a displacement calculation module. In the present disclosure, a photodetector is configured to collect an intensity of scalar interference light of the object to be measured being moved, to obtain a periodic light intensity change curve; a CCD camera is configured to collect images of interference vortex light of the object being moved; and the displacement calculation unit is configured to calculate a displacement of the object according to integer periods of the light intensity change curve and angles of image changes of the interference vortex light.

Composite measurement system for measuring nanometer displacement

A surface texture probe and a surface texture measurement apparatus with a vibrational membrane are provided. The probe includes a housing and a vibrational membrane, a stylus holder, a vertical guide assembly, a guide adjustment assembly and a stylus. An inner end of the vibrational membrane is attached to an upper end of the stylus holder. An outer end of the vibrational membrane is fixed to a vibrational membrane connection assembly fixedly connected to the housing. The vertical guide assembly is fixed inside the housing and slidably connected to the stylus holder and configured to guide the stylus holder to move in a vertical direction. The stylus is fixed to a lower end of the stylus holder. The guide adjustment assembly is mounted on the vertical guide assembly and configured to adjust a sliding friction force between the vertical guide assembly and the stylus holder.

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Beijing, China

Yushu Shi