Applied Materials Israel Limited

Nova Corporation

Yuri Shirman

Gilad Barak

Dror Shemesh

Yanir Hainick

Dror Shafir

Elad Schleifer

Boris Levant

Michael Chemama

Smadar Ferber

Ze'Ev Lindenfeld

Semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting an earlier-in-time portion of the time-domain representation that excludes a later-in-time portion of the time-domain representation, and determining one or more measurements of one or more parameters of interest of the patterned structure by performing model-based processing using the earlier-in-time portion of the time-domain representation.

Time-domain optical metrology and inspection of semiconductor devices

A system for providing a compensated Auger spectrum, the system includes: a processor, adapted to generate a compensated Auger spectrum in response to a non-compensated Auger spectrum and in response to an electric potential related parameter, and an interface to an electron detector that is adapted to detect electrons emitted from the first area, wherein the interface is connected to the processor, and wherein the electric potential related parameter reflects a state of a first area of an object that was illuminated by a charged particle beam during the generation of the non-compensated Auger spectrum.

Method and system for providing a compensated auger spectrum

Growing community of inventors

Rehovot, Israel

Yuri Shirman