Other

Hitachi Electronics Engineering Co., Ltd.

Hitachi High-Tech Electronics Engineering Co., Ltd.

Yuko Inoue

Tetsuya Watanabe

Aritoshi Sugimoto

Wakana Shinke

Junichi Taguchi

Minori Noguchi

Hidetoshi Nishiyama

Takahiro Jingu

Yoshimasa Ohshima

Kenji Watanabe

Hisato Nakamura

Masami Ikota

Keiichi Saiki

Masami Ikoto

An apparatus for inspecting foreign matter in repeated micro-miniature patterns formed upon a surface of an object to be inspected, comprising: an inspection light illuminating device for irradiating an inspection light directed upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; a scattered light detector for detecting scattered light of the inspection light being scattered upon the surface said object to be inspected; means for obtaining a first information related to a foreign matter attaching upon the surface of said object to be inspected, which is obtained on a basis of the detection of said scattered light by said scattered light detector; an illumination means for applying a bright field illumination upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; means for picking up the image of the foreign matter, under a bright field illumination by said illumination means; means for obtaining a second information related to said foreign matter, depending upon an image of said foreign matter, which is obtained on a basis of said picking up of the image by said image picking up means under the bright field illumination; and means for displaying said first information and said second information, both being related to said foreign matter, on a display screen thereof.

Inspecting method and apparatus for repeated micro-miniature patterns

A system and method of inspecting a foreign particle or a defect on a sample are provided. Such a method comprises irradiating light to an object to be inspected; detecting reflected light or scattered light from the object to be inspected irradiated with the light; detecting a signal of the foreign particle or the defect from the detected signal; providing information related to a size of the foreign particle or the defect from the signal of the detected foreign particle or the defect; and outputting information on a display screen a distribution of the size of the foreign particle or defect with information indicating a cause of the distribution of the foreign particle or defect.

Apparatus and method of inspecting foreign particle or defect on a sample

Growing community of inventors

Okegawa, Japan

Yuko Inoue