Spansion Llc.

Cypress Semiconductor Corporation

Fujitsu Amd Semiconductor Limited

Yukihiro Utsuno

Masahiko Higashi

Tatsuya Kajita

Hiroyuki Nansei

Hideo Takagi

Kentaro Sera

Manabu Nakamura

Yukio Hayakawa

Fumiaki Toyama

Namjin Heo

Naofumi Takahata

A semiconductor device includes bit lines provided in a semiconductor substrate; an ONO film that is provided along the surface of the semiconductor substrate and is made of a tunnel oxide film, a trap layer, and a top oxide film; and an oxide film that is provided on the surface of the semiconductor substrate in the middle between the bit lines and contacts the side face of the ONO film, in which the film thickness of the oxide film is larger than the sum of the thicknesses of the tunnel oxide film and the top oxide film, and smaller than the thickness of the ONO film.

Semiconductor device and method for manufacturing thereof

A silicon nitride film, which is a second hard mask, is dry etched to be removed completely. The silicon nitride film, which is formed on a sidewall of a silicon nitride film used as a first hard mask, has a relatively low etching rate. Therefore, if the silicon nitride film is continued etching until the corresponding portion thereof is removed, polysilicon is etched in a direction of depth in trench shape. Then, floating gates in adjacent cells are separated and a step portion of the polysilicon is formed. Consequently, a remaining portion of the silicon nitride film used as the first hard mask is removed, an ONO film is laminated on a whole surface of the poly silicon having the step portion on an edge that has been etched, and then, a polysilicon for a control gate is laminated on the ONO film.

Semiconductor device and method for fabricating thereof

A semiconductor device in accordance with one embodiment of the invention can include a semiconductor substrate having a groove, a bit line, a pocket implantation region, a bottom insulating membrane, and a charge accumulation region. The bit line is formed on a side of the groove in the semiconductor substrate and acts as a source and a drain. The pocket implantation region is formed to touch (or contact) the bit line, has a similar conductivity type as the semiconductor substrate, and has a dopant concentration higher than that of the semiconductor substrate. The bottom insulating membrane is formed on and touches (or contacts) a side surface of the groove. The charge accumulation layer is formed on and touches (or contacts) a side surface of the bottom insulating membrane.

Semiconductor device and method of manufacturing the same

Semiconductor device with ONO film

A semiconductor device includes a bit line that is provided in a semiconductor substrate, a silicide layer that has side faces and a bottom face surrounded by the bit line and is provided within the bit line, an ONO film that is provided on the semiconductor substrate, and sidewalls that are in contact with the side faces of a trapping layer in the ONO film over the portions of the bit line located on both sides of the silicide layer, the sidewalls being formed with silicon oxide films including phosphorus.

Method of manufacturing a semiconductor device having lower leakage current between semiconductor substrate and bit lines

A semiconductor device is disclosed. The semiconductor device includes a plurality of memory cells provided in a matrix and having a charge storage layer, a plurality of word lines provided on the charge storage layer, and an application section. When reading data from a selected memory cell selected from the plurality of memory cells, the application section applies a voltage having an opposite polarity to the voltage applied to a selected word line to non-selected word lines arranged on both adjacent sides of the selected word line.

Semiconductor device and method for controlling

A method for manufacturing a semiconductor device, the method including: forming a bit line in a semiconductor substrate; forming a plurality of word lines which intersect with the bit line at predetermined intervals on the semiconductor substrate; eliminating a portion of the plurality of word lines; forming an interlayer insulating film on the semiconductor substrate; and forming a metal plug which penetrates through the interlayer insulating film and is coupled to the bit line in a region where the portion of the plurality of word lines was eliminated.

Flash memory device with word lines of uniform width and method for manufacturing thereof

A semiconductor device which includes two trenches formed in a semiconductor substrate, a charge storage layer as an insulator formed on each side surface of the trenches, and separated on a bottom surface thereof, and a bit line formed below the bottom surface of the trenches in the semiconductor substrate. A channel region is formed in the semiconductor substrate from a side surface of one of the two trenches to that of the other trench via an upper surface of a protruding portion between those two trenches. A method for manufacturing the semiconductor device is also provided.

Semiconductor device having lower leakage current between semiconductor substrate and bit lines

A semiconductor device is disclosed. The semiconductor device includes a plurality of memory cells that are provided in a matrix and that have a charge storage layer made of an insulating film that is provided on a semiconductor substrate and a plurality of word lines that are provided on the charge storage layer. A plurality of memory cells that are arranged in a single line among the plurality of memory cells arranged in the matrix are coupled to the same word line. The semiconductor device further includes an application section that when reading data from a selected memory cell selected from the plurality of memory cells, applies a voltage to a selected word line to be coupled to the selected memory cell among the plurality of word lines. The application section applies a voltage that has a polarity that is opposite to the voltage applied to the selected word line to non-selected word lines arranged on both adjacent sides of the selected word line.

After an ONO film in which a silicon nitride film () formed by a plasma nitriding method using a plasma processor having a radial line slot antenna is sandwiched by silicon oxide films (), (), a bit line diffusion layer () is formed in a memory cell array region () by an ion implantation as a resist pattern () taken as a mask, then lattice defects are given to the silicon nitride film () by a further ion implantation. Accordingly, a highly reliable semiconductor memory device can be realized, in which a high quality nitride film is formed in a low temperature condition, in addition, the nitride film can be used as a charge trap film having a charge capture function sufficiently adaptable for a miniaturization and a high integration which are recent demands.

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Fukushima-ken, Japan

Yukihiro Utsuno