Kabushiki Kaisha Toshiba

Hitachi High-tech Corporation

Yuki Numata

Kenji Hirohata

Tomoyuki Suzuki

Tomonao Takamatsu

Shigeru Kawamata

Tomoko Monda

Hirofumi Sato

To assist an operator in setting an observation conditions, so as to acquire an image with a desired image quality (such as contrast) in a charged particle beam device without falling into trial and error based on the experience of the operator. Therefore, the charged particle beam device includes a stageon which a sample is placed, a charged particle optical system configured to irradiate the sample with a charged particle beam, detectorsandconfigured to detect an electron generated by an interaction between the charged particle beam and the sample, a control unitconfigured to control the stage and the charged particle optical system according to an observation condition set by the operator and configured to form an image based on a detection signal from the detectors, and a displayconfigured to display an observation assist screen for setting the observation condition. The control unit displays, on the observation assist screen, informationrelated to an irradiation electron amount per pixel irradiated onto the sample by the charged particle optical system under the observation condition.

Charged particle beam device and method for setting condition in charged particle beam device

According to one embodiment an electronic apparatus includes a housing, a heat generating element, a plurality of sensors, and an index calculator. The heat generating element is housed in the housing. The index calculator calculates an index corresponding to a physical quantity or an index indicating performance of the electronic apparatus, based on a correlation between detected values of the sensors and the index.

Electronic apparatus, index calculating method, and computer program product

Growing community of inventors

Tokyo, Japan

Yuki Numata