Other

Ahbee 1, L.p.

Abhee 1, L.p.

Yuen Lim

Phuc Van

Michael Current

Junction photovoltage probe face

An apparatus for the automatic testing the adhesion characteristics of thin film and coating to silicon wafers, and the processing of the data obtained thereby to present to the user a rapid and accurate forecast of the thin film's behavior in a selected processing environment. The apparatus of the invention heats and cools samples while automatically monitoring for debonding. Information collected from the optical and thermal devices are processed by computer for analysis and recorded for cataloging. Information is collected and processed over time while samples are subjected to selected temperature environments to provide a data base of adhesion characteristics of thin films and coatings.

Method and apparatus for adhesion testing of thin film materials

An apparatus is disclosed for in situ characterizing and quantifying physical properties of thin film materials over time and in various environments. Through the utilization of multiple probes and sensors, and the processing of the data, a rapid and accurate forecast of the material's behavior in a selected environment may be obtained. The present invention scans for a variety of properties, including film stress, film thickness, desorption, reflectivity, and resistivity. Photodetectors are used to collect reflected light which is processed by computer for analysis, while simultaneously processing data collected from the probes and sensors placed within and without the testing chamber. Data is collected and analyzed over time while sample materials are subjected to selected environments, including thermal cycling and gaseous or vacuum environments, using multiple probes according to the user's industry needs.

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San Jose, CA, United States of America

Yuen Lim