National Chung Cheng University

Yu-Ta Chen

Chien-Sheng Liu

Yu-Xiang Lin

Yong-Tai Luo

Yu-Fan Pu

The present invention provides a multi-degree-of-freedom error measurement system for rotary axes and the method thereof. By producing a first ray, a second ray, and a third ray, the multi-facet reflector and the axicon disposed on an axis average line can receive the first, the second, and the third rays, respectively, for producing a reflective ray, a refractive ray, a first emitted ray, and a second emitted ray. Thereby, errors of the axicon in a plurality of degrees of freedom caused by shift or vibration of the axis average line, such as the x-axis radial error, the y-axis radial error, the axial error, the x-axis tilt error, the tilt error for the y-axis, and the angular alignment error for rotation can be measured.

Multi-degree-of-freedom error measurement system for rotary axes and method thereof

The present invention relates to a method and an apparatus for measuring errors of a movable platform in multiple degrees of freedom. A light-source module disposed on a fixed platform emits light to a lens module disposed on a movable platform. The light is reflected to one or more optoelectronic sensing module on the fixed platform via the lenses of the lens module. Then a processing unit calculates an alignment error or/and one or more straightness error or/and one or more angle error of the movable platform according to the signal generated by the optoelectronic sensing module.

Growing community of inventors

Chiayi County, Taiwan

Yu-Ta Chen