National Taiwan University

Yu-Fu Ku

Shiming Lin

Shu Kuan

Long-Sun Huang

Kuang-Chong Wu

Yi-Kuang Yen

Ping-Yen Lin

A system for compensating a thermal effect is provided and includes a substrate structure and a microcantilever. The substrate structure includes a first piezoresistor. The first piezoresistor is buried in the substrate structure and has a first piezoresistance having a first relation to a first variable temperature. The microcantilever has the thermal effect and a second piezoresistance having a second relation to the first variable temperature, wherein the thermal effect is compensated based on the first and the second relations.

Growing community of inventors

Chiayi County, Taiwan

Yu-Fu Ku