Canon Kabushiki Kaisha

Yozo Fukagawa

Masami Yonekawa

Accurate alignment can be attained irrespective of strains of the main body structure. An exposure apparatus, which has a substrate stage ( ) which holds and moves a substrate ( ), a position measurement unit ( ) for measuring the position of the substrate stage, and a control unit ( ) for performing drive control of the substrate stage to align the substrate on the basis of the measured position, and which aligns the substrate and a master plate ( ), and forms a pattern on the master plate on the substrate by exposure, has a strain measurement unit ( ) for measuring strain of a structure ( ) to which the position measurement unit is fixed, and the control unit aligns the substrate by the drive control of the stage in consideration of the measured strain.

Exposure apparatus and its control method, stage apparatus, and device manufacturing method

An exposure apparatus, which includes a projection optical system for forming an image of a pattern formed on a master plate, a substrate stage for holding and moving a substrate to be exposed to an imaging position, a position measurement device for measuring a position of the master plate or substrate or relative positions of the master plate and substrate, an alignment device for moving the master plate or substrate on the basis of a measurement value of the position measurement device to adjust the position or relative positions, a main body structure for holding the projection optical system, the substrate stage, and the position measurement device, and a support base for supporting the main body structure. The apparatus includes a measurement device for measuring a variation amount of a principal force acting between the main body structure and the support base or a physical quantity acting on the main body structure, and a correction device for correcting a measurement value of the measurement device using a correction vector obtained by multiplying the measurement result of the measurement device by a predetermined coefficient matrix.

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Kawachi-gun, Japan

Yozo Fukagawa