Electronics and Telecommunications Research Institute

Young K Choe

Jae Seung Lee

Jin Ho Lee

Jin Yeong Kang

Kyu Hwan Shim

Jeon Wook Yang

An X-ray generation system for an ultra fine lithography includes a center electrode having an adjusting member, peripheral electrode having gas flow holes, a metal disc having gas flow holes for generating the X-ray from a plasma, a large capacitor, a transparent cylinder, a discharge member, Be discharge and observing windows, a cylindrical insulator, exhaust holes, a metal container, large electric power spatial gap switches, a current returning wire, an exhaust pump, and gas feeding members. Thereby, the system provides continuous operation and increased stability, controlling and discharging quantity so that the X-ray system can be easily utilized for researching and commercial applications.

Growing community of inventors

Daejeon-Si, South Korea

Young K Choe