Average Co-Inventor Count = 3.60
ph-index = 7
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Intel Corporation (7 from 54,664 patents)
2. Lam Research Corporation (1 from 3,768 patents)
3. Ontrak Systems, Inc. (1 from 34 patents)
8 patents:
1. 6475293 - Rotating belt wafer edge cleaning apparatus
2. 6357071 - Rotating belt wafer edge cleaning apparatus
3. 6334229 - Apparatus for cleaning edges of contaminated substrates
4. 6092253 - Flexible-leaf substrate edge cleaning apparatus
5. 5901399 - Flexible-leaf substrate edge cleaning apparatus
6. 5868857 - Rotating belt wafer edge cleaning apparatus
7. 5861066 - Method and apparatus for cleaning edges of contaminated substrates
8. 5725414 - Apparatus for cleaning the side-edge and top-edge of a semiconductor