Lam Research Corporation

Stc.unm

Youn-Jin Oh

Sang M Han

Cornelius F Ivory

Eric A Hudson

Hitoshi Takahashi

Kenji Takeshita

Leonid Belau

Rui Takahashi

Yilun Li

Wonjae Lee

Various embodiments herein relate to methods and apparatus for etching recessed features on a semiconductor substrate. The techniques described herein can be used to form high quality recessed features with a substantially vertical profile, low bowing, low twisting, and highly circular features. These high quality results can be achieved with a high degree of selectivity and a relatively high etch rate. In various embodiments, etching involves exposing the substrate to plasma generated from a processing gas that includes a chlorine source, a carbon source, a hydrogen source, and a fluorine source. The chlorine source may have particular properties. In some cases, particular chlorine sources may be used. Etching typically occurs at low temperatures, for example at about 25 C or lower.

High aspect ratio dielectric etch with chlorine

A method for etching features in an etch layer is provided. An organic mask layer is etched, using a hard mask as an etch mask. The hard mask is removed, by selectively etching the hard mask with respect to the organic mask and etch layer. Features are etched in the etch layer, using the organic mask as an etch mask.

Prevention of line bending and tilting for etch with tri-layer mask

Exemplary embodiments provide systems and methods for concentrating, focusing and/or separating proteins using nanofluidic channels and/or their arrays. In embodiments, low-abundance proteins can be focused and separated with high resolution using separation techniques including isoelectric focusing (IEF), and/or dynamic field gradient focusing (DFGF) in combination with nanofluidic channels and/or multi-gate nanofluidic field-effect-transistors (FETs).

High resolution focusing and separation of proteins in nanofluidic channels

Various embodiments provide an exemplary lab-on-a-chip (LOC) system that serves as an analytical tool and/or as a separation medium for an electrolyte solution including various charged molecular species. The LOC system can include an integrated nanofluidic FET device in combination with suitable analysis systems. By applying and controlling a longitudinal electric field and a transverse electric potential, the flow and the pH of the electrolyte solution in the nanofluidic channels can be controlled.

Control of electrolyte solution in nanofluidic channels

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San Ramon, CA, United States of America

Youn-Jin Oh