Hitachi Construction Machinery Co., Ltd.

Hitachi Kenki Fine Tech Co., Ltd.

Yoshiyuki Nagano

Takafumi Morimoto

Hideto Ishibashi

Tooru Kurenuma

Hiroshi Kuroda

Kazuhiro Sugawara

Takenori Hiroki

Akira Hashimoto

Ken Murayama

Toru Kurenuma

Yukio Kenbou

Yuuichi Kunitomo

Shigeru Miwa

Hiroaki Yanagimoto

Masahiro Watanabe

Yukio Kembo

Takenori Hirose

Yasushi Minomoto

The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantileverhaving a probe tipfacing a sample. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms, andare used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.

Scanning type probe microscope and probe moving control method therefor

A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.

Scanning probe microscope and measurement method using the same

A method an apparatus for measuring the depths of many fine holes formed in the surface of a sample by etching. Positional information on a plurality of hole patterns is acquired by scanning, with a stylus, the surface of the sample in which the hole patterns are formed by etching. The depths of the plurality of hole patterns are measured by scanning, with the stylus, bottom faces of the plurality of hole patterns and the surface of the sample in the respective vicinities of the hole patterns on the basis of the positional information that has been acquired. Information on distribution of the depths of the plurality of hole patterns is displayed on a screen on the basis of information on the measured depths of the plurality of hole patterns and the positional information on each of the hole patterns.

Method and apparatus for measuring depth of holes formed on a specimen

An automatically operated shovel, which includes a power shovel and an automatic operation controller for making the power shovel reproduce a series of taught operations ranging from digging to dumping, is characterized in that the automatic operation controller is provided with a positioning determinator for determining whether or not the power shovel has reached within a taught position range predetermined based on corresponding one of positioning accuracies set for individual taught positions of said power shovel, and, when the power shovel is determined to have reached within the predetermined taught position range, the automatic operation controller outputs a next taught position as a target position.

Automatically operated shovel and stone crushing system comprising same

An automatically operated shovel, which includes a power shovel and an automatic operation controller for making the power shovel reproduce a series of taught operations ranging from digging to dumping, is characterized in that the automatic operation controller is provided with a positioning determination means for determining whether or not the power shovel has reached within a taught position range predetermined based on corresponding one of positioning accuracies set for individual taught positions of said power shovel, and, when the power shovel is determined to have reached within the predetermined taught position range, the automatic operation controller outputs a next taught position as a target position.

Automatically operated shovel and stone crushing system comprising the same

An automatically operated shovel has a shovel and an automatic operation controller arranged on the shovel to store by a teaching operation plural working positions of the shovel, which comprises at least a digging position, and also to cause by a reproduction operation the shovel to repeatedly perform a series of reproduction operations on the basis of the stored plural working positions. The automatic operation controller is provided with servo control means for outputting, as a servo control quantity, a sum of a compliance control quantity and a pressure control quantity. The compliance control quantity is obtained by multiplying with a stiffness gain a difference between a target position of each operational element of the shovel, the target position comprising angle information indicative of an operational target of the operational element, and a current position of the operational element, the current position comprising current angle information on the operational element. The pressure control quantity is obtained by multiplying with a pressure gain a difference between a target pressure, which serves as a target when the operational element of the shovel is in contact with an object under digging, and a current pressure of the operational element. The stiffness gain and the pressure gain are settable at varied values depending on the working positions.

Automatically operated shovel

Growing community of inventors

Tsuchiura, Japan

Yoshiyuki Nagano