Hitachi High-Tech Corporation

Yoshihiro Satou

Akio Yazaki

Katsuhiko Kimura

Kei Shibayama

Kenshiro Ohtsubo

Hitoshi Matsuno

Yuichirou Iijima

Osamu Yoshimura

Ayumi Tomiyama

The purpose of the present invention is to provide a substrate inspection device that increases the flatness of a substrate during inspection, and improves the detection sensitivity of foreign matter. Therefore, the present invention is a substrate inspection device provided with a turntable on which a substrate to be inspected is mounted, and a clamp mechanism that holds the substrate on the turntable. The substrate inspection device is characterized in that the clamp mechanism has an abutting part that moves in an in-plane direction of the substrate and presses the substrate. Preferably, the abutting part contacts or separates from an outer peripheral side surface of the substrate by rotating centered on a rotational axis in an out-of-plane direction of the substrate.

Substrate inspection device

A surface inspection device () according to the present invention comprises: a plate-shaped sample holding member () which can hold a sample (); a spindle motor () for rotating the sample holding member (); a turntable () which is fixed to the spindle motor () and rotated by the spindle motor (); a frame () to which the spindle motor () is fixed; a plurality of support members () each having one end fixed to the sample holding member () and the other end fixed to the turntable (), the support members supporting the sample holding member () such that the sample holding member is displaceable in a focus direction which is the height direction with respect to the turntable (); and a sample drive unit () which displaces the sample holding member () in the focus direction with respect to the turntable (). This surface inspection device () can accurately drive the sample () in the focus direction.

Surface inspection device

The purpose of the present invention is to allow a clean airflow around a substrate to reliably move downward of the substrate in an examination device in which clean air is supplied to an inspection chamber. This examination device is provided with a rectifying plate (see FIG.A) which covers a part of the upper surface of a stage for mounting a substrate, and is disposed between a gas supply unit and the stage to block an airflow toward the substrate.

Examination device

Growing community of inventors

Tokyo, Japan

Yoshihiro Satou